TABLE 2 MATERIAL USED AT PROCESSING FACILITY 3. Research About Waste Disposal Toxic gases which are used in the semiconductor processing as shown in Table 2 must be handled properly. Efforts should be made toward looking for other safe gas sources which will be substituted for above ones. 4. Examination of Dexterity of Computer Controlled Manipulator At an unmanned space factory, the dexterous manipulator plays a main role in managing the entire process. The space application of terrestrial robotics must be tried intensively. CONCLUSION The research effort is not completed, only the outlook is described here. We must take notice of the fact that space provides a super clean environment as well as a zero-gravity field. In order to realize an MW-class factory, it is shown that we have many research items to be studied on the space shuttle/space station. REFERENCES 1. D.M. Waltz. Is There Business in Space? AIAA-81-0891, 1981. 2. K. Maeda, Recent Process Technology and Equipments, Electron. Mater. 22 (11), 1980. 3. S. Namba, Microfabrication and Its Future Trend, Electron. Mater. 22 (3), 1981. 4. I. Kudo and H. Fujisada, Space Semiconductor Processing Factory, Space Station Symp., 1982. 5. C.R. Watts, The Materials Experiment Carrier, AIAA-80-0316, 1980.
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