plasma being away from the aperture. To overcome this difficulty, the simple matching is tried by inserting a quarter-wave matching section into the coupler as in Fig. 2(III). The coupler with matching section consists of two guides with the different gap spacings, Gj and G2. The detailed length 1 of matching section is determined through the experiment.
RkJQdWJsaXNoZXIy MTU5NjU0Mg==